Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6798065 | Method and apparatus for high-resolution in-situ plasma etching of inorganic and metals films | Michael Berg, Maureen R. Brongo | 2004-09-28 |
| 6383821 | Semiconductor device and process | David T. Young, Hadi Abdul-Ridha, Maureen R. Brongo | 2002-05-07 |
| 6328848 | Apparatus for high-resolution in-situ plasma etching of inorganic and metal films | Michael Berg, Maureen R. Brongo | 2001-12-11 |
| 6291361 | Method and apparatus for high-resolution in-situ plasma etching of inorganic and metal films | Michael Berg, Maureen R. Brongo | 2001-09-18 |
| 6251568 | Methods and apparatus for stripping photoresist and polymer layers from a semiconductor stack in a non-corrosive environment | Peter Yu Fei Huang | 2001-06-26 |
| 5314772 | High resolution, multi-layer resist for microlithography and method therefor | Michael N. Kozicki | 1994-05-24 |