Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10197909 | Method of reducing shot count in direct writing by a particle or photon beam | Luc Martin, Thomas Quaglio, Matthieu Millequant, Clyde Browning | 2019-02-05 |
| 9891519 | Free form fracturing method for electronic or optical lithography using resist threshold control | Luc Martin | 2018-02-13 |
| 9607808 | Method of electron-beam lithography with correction of corner roundings | — | 2017-03-28 |
| 9250540 | Lithography method with combined optimization of radiated energy and design geometry | — | 2016-02-02 |
| 9235132 | Large-mesh cell-projection electron-beam lithography method | — | 2016-01-12 |
| 8713499 | Electron-beam lithography method with correction of line ends by insertion of contrast patterns | — | 2014-04-29 |
| 7955914 | Method of producing an asymmetric architecture semi-conductor device | Jessy Bustos, Philippe Coronel, Laurent Pain | 2011-06-07 |
| 7897308 | Method for transferring a predetermined pattern reducing proximity effects | Laurent Pain, Georges Bervin | 2011-03-01 |
| 6807662 | Performance of integrated circuit components via a multiple exposure technique | Olivier Toublan, Yorick Trouiller | 2004-10-19 |