Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5105761 | Diffusion plasma-assisted chemical treatment apparatus | Barbara Charlet, Thierry Sindzingre | 1992-04-21 |
| 5047115 | Process for etching by gas plasma | Barbara Charlet | 1991-09-10 |
| 4990859 | Process and apparatus for determining the impedance of the discharge in a plasma reactor system comprising a tuning box and application to the regulation of the impedance or the ionic current in such reactor | Bernard Bouyer, Bernard Andries, Guillaume RAVEL | 1991-02-05 |
| 4491496 | Enclosure for the treatment, and particularly for the etching of substrates by the reactive plasma method | Philippe Laporte | 1985-01-01 |