Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573492 | Calibration of elementary small patterns in variable-shaped-beam electron-beam lithography | Aurélien Fay | 2020-02-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573492 | Calibration of elementary small patterns in variable-shaped-beam electron-beam lithography | Aurélien Fay | 2020-02-25 |