Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7993949 | Heterogeneous substrate including a sacrificial layer, and a method of fabricating it | Francois Perruchot, Bernard Diem, Vincent Larrey, Laurent Clavelier | 2011-08-09 |
| 7906439 | Method of fabricating a MEMS/NEMS electromechanical component | Francois Perruchot, Bernard Diem, Vincent Larrey, Laurent Clavelier | 2011-03-15 |