Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9097994 | Abrasive-free planarization for EUV mask substrates | Suryadevara V. Babu, Hariprasad Amanapu, Uma Rames Krishna Laguda | 2015-08-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9097994 | Abrasive-free planarization for EUV mask substrates | Suryadevara V. Babu, Hariprasad Amanapu, Uma Rames Krishna Laguda | 2015-08-04 |