AS

Akihito Sugino

CK Ckd: 4 patents #57 of 332Top 20%
TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
📍 Gunpo-si, KR: #188 of 683 inventorsTop 30%
Overall (All Time): #1,179,283 of 4,157,543Top 30%
4
Patents All Time

Issued Patents All Time

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
10317269 Flow rate verification unit Naoya Shiroyama, Minoru Ito 2019-06-11
7904257 Flow verification system and flow verification method Akiko Nakada, Kazutoshi Itoh 2011-03-08
7874316 Purge gas unit and purge gas supply integrated unit Tsuneyuki Okabe, Yoji Mori, Takeya Inagaki 2011-01-25
7853416 Flow rate verification failure diagnosis apparatus, flow rate verification failure diagnosis system, flow rate verification failure diagnosis method, and control program product for flow rate verification failure diagnosis Akiko Nakada, Keisuke Kato, Hiroki Doi 2010-12-14