Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770420 | Alkylsulfonyloximes for high-resolution i-line photoresists of high sensitivity | Kurt Dietliker, Martin Kunz, Hitoshi Yamato | 2004-08-03 |
| 6004724 | Oxime sulfonates and the use thereof as latent sulfonic acids | Hitoshi Yamato, Hartmut Bleier, Jean-Luc Birbaum, Martin Kunz, Kurt Dietliker +1 more | 1999-12-21 |
| 5558978 | Photoresist compositions containing copolymers having acid-labile groups and recurring units derived from either N-(hydroxymethyl)maleimide or N-(acetoxymethyl)maleimide or both | Ulrich Sch adeli, Norbert M unzel, Heinz Holzwarth, Eric Tinguely | 1996-09-24 |