Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7731801 | Semiconductor wafer treatment method and apparatus therefor | Makoto Takemura, Yasuo Fukuda, Junichiro Iwahashi, Koichi Okuda | 2010-06-08 |
| 7678200 | Technique on ozone water for use in cleaning semiconductor substrate | Makoto Takemura, Yasuo Fukuda, Masaaki Kato, Eiji Suhara | 2010-03-16 |