Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7678200 | Technique on ozone water for use in cleaning semiconductor substrate | Makoto Takemura, Yasuo Fukuda, Kazuaki Souda, Masaaki Kato | 2010-03-16 |
| 4673493 | Apparatus for supplying filtered liquid | Atsuki Wada, Mikio Takahashi | 1987-06-16 |