Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6300251 | Repeatable end point method for anisotropic etch of inorganic buried anti-reflective coating layer over silicon | Yelehanka Ramachandramurthy Pradeep, Henry Gerung | 2001-10-09 |