EL

Erzhuang Lzu

CM Chartered Semiconductor Manufacturing: 1 patents #419 of 840Top 50%
📍 Singapore, SG: #6,661 of 13,971 inventorsTop 50%
Overall (All Time): #3,571,329 of 4,157,543Top 90%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6183189 Self aligning wafer chuck design for wafer processing tools Xiaosong Eric Tang, Yih-Shung Lin, Charles Lin 2001-02-06