Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6274500 | Single wafer in-situ dry clean and seasoning for plasma etching process | Liang-Hsin Chen, Aik Kwang Ng, Young-Tong Tsai | 2001-08-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6274500 | Single wafer in-situ dry clean and seasoning for plasma etching process | Liang-Hsin Chen, Aik Kwang Ng, Young-Tong Tsai | 2001-08-14 |