Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10636934 | Method and device for passivating defects in semiconductor substrates | Thomas Pernau, Peter Völk, Wolfgang Scheiffele, Andreas Reichart, Olaf Romer +1 more | 2020-04-28 |
| 10082346 | Cooling module and apparatus for thermally treating substrates | Matthias Tumback, Reinhard Lenz, Moritz Vogt | 2018-09-25 |