Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10082346 | Cooling module and apparatus for thermally treating substrates | Hans-Peter Elser, Matthias Tumback, Moritz Vogt | 2018-09-25 |
| 6705457 | Transport device and method of transporting to-be-processed elements through a high-temperature zone | Daniel Biro, Peter Völk, Gernot Wandel | 2004-03-16 |