Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11600739 | Apparatus and method for patterned processing | Erik Johnson, Pavel Bulkin, Nada Habka, Gilles Olav Tanguy Sylvain Poulain, Nacib Benmammar | 2023-03-07 |
| 10319565 | Method and system for controlling ion flux in an RF plasma | Erik Johnson, Tatiana Novikova, Jean-Paul Booth | 2019-06-11 |