Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9221928 | Fluorine-containing sulfonate resin, fluorine-containing N-sulfonyloxyimide resin, resist composition and pattern formation method | Misugi Kato, Yoshimi Isono, Satoru Narizuka, Kazunori Mori | 2015-12-29 |
| 9182664 | Polymerizable fluorine-containing sulfonate, fluorine-containing sulfonate resin, resist composition and pattern-forming method using same | Satoru Narizuka | 2015-11-10 |
| 8993212 | Fluorine-containing sulfonic acid salts, photo-acid generator and resist composition and pattern formation method utilizing same | Satoru Narizuka | 2015-03-31 |
| 8846966 | Method for producing alkoxycarbonylfluoroalkanesulfonic acid salt | Yuji Hagiwara, Masanori Fushimi, Yoshimi Isono, Satoru Narizuka | 2014-09-30 |