Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8748672 | 2-(alkylcarbonyloxy)-1, 1-difluoroethanesulfonic acid salt and method for producing the same | Yuji Hagiwara, Masashi Nagamori, Masaki Fujiwara, Satoru Narizuka | 2014-06-10 |
| 8592622 | Polymerizable fluorine-containing compound | Yoshimi Isono, Satoru Narizuka | 2013-11-26 |
| 8581009 | 2-(alkylcarbonyloxy)-1, 1-difluoroethanesulfonic acid salt and method for producing the same | Yuji Hagiwara, Masashi Nagamori, Masaki Fujiwara, Satoru Narizuka | 2013-11-12 |
| 8513457 | Fluorine-containing compound, fluorine-containing polymer, negative-type resist composition, and patterning process using same | Yoshimi Isono, Satoru Narizuka, Kazuhiro Yamanaka | 2013-08-20 |
| 8435717 | Compound for photoacid generator, resist composition using the same, and pattern-forming method | Yuji Hagiwara, Satoru Narizuka, Kazuhiko Maeda | 2013-05-07 |
| 8222448 | Processes for production of 2-bromo-2,2-difluoroethanol and 2-(alkylcarbonyloxy)-1, 1-difluoroethanesulfonic acid salt | Masashi Nagamori, Yuji Hagiwara, Masaki Fujiwara, Satoru Narizuka | 2012-07-17 |
| 8187787 | Fluorine-containing compound, fluorine-containing polymer, negative-type resist composition, and patterning process using same | Yoshimi Isono, Satoru Narizuka, Kazuhiro Yamanaka | 2012-05-29 |
| 8110711 | Processes for production of 2-bromo-2,2-difluoroethanol and 2-(alkylcarbonyloxy)-1,1-difluoroethanesulfonic acid salt | Masashi Nagamori, Yuji Hagiwara, Masaki Fujiwara, Satoru Narizuka | 2012-02-07 |
| 7956142 | Polymerizable sulfonic acid onium salt and resin | Tomoki Nagai, Takuma Ebata, Makoto Shimizu, Satoru Narizuka, Masaki Fujiwara | 2011-06-07 |
| 7906269 | Positive-type resist composition | Yoshimi Isono, Satoru Narizuka, Kazuhiro Yamanaka | 2011-03-15 |
| 7887990 | Fluorine-containing compound, fluorine-containing polymer, postive-type resist composition, and patterning process using same | Yoshimi Isono, Satoru Narizuka | 2011-02-15 |
| 7414148 | Process for producing alkoxycarbonylfluoroalkanesulfonates | Masaki Fujiwara, Satoru Narizuka | 2008-08-19 |