SL

Shiliang Lu

CE Celerity: 4 patents #6 of 34Top 20%
SC Shanghai Micro Electronics Equipment (Group) Co.: 1 patents #81 of 212Top 40%
Overall (All Time): #958,589 of 4,157,543Top 25%
5
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11469121 Spin coating device and method Hang Ran, Yihui Li, Xiaoping Yan, Jun Zhao, Shanshan Chen 2022-10-11
7363182 System and method for mass flow detection device calibration Stuart A. Tison 2008-04-22
7287434 System and method for measuring flow Stuart A. Tison 2007-10-30
7243035 System and method for mass flow detection device calibration Stuart A. Tison 2007-07-10
7150201 System and method for measuring flow Stuart A. Tison 2006-12-19