TG

Tim Groothuijsen

CG Carl Zeiss Smt Gmbh: 1 patents #657 of 1,189Top 60%
Overall (All Time): #2,912,129 of 4,157,543Top 75%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10095120 Vibration-compensated optical system, lithography apparatus and method Yim-Bun Patrick Kwan 2018-10-09