Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105415 | Method, apparatus and computer program for analyzing and/or processing of a mask for lithography | — | 2024-10-01 |
| 11079586 | Measuring microscope for measuring masks for lithographic methods and measuring method and calibration method therefor | Carola Bläsing-Bangert, Dirk Seidel | 2021-08-03 |