Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10599052 | Vacuum system, in particular EUV lithography system, and optical element | Eugen Foca | 2020-03-24 |
| 10241421 | Vacuum system, in particular EUV lithography system, and optical element | Eugen Foca | 2019-03-26 |
| 9952519 | Vacuum linear feed-through and vacuum system having said vacuum linear feed-through | Eugen Foca | 2018-04-24 |