Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7294814 | Microlithography projection objective including deformable mirror with adjusting elements and systems and methods using the same | Michael Gerhard, Gerald Richter | 2007-11-13 |
| 7112772 | Catadioptric projection objective with adaptive mirror and projection exposure method | Michael Gerhard, Gerald Richter | 2006-09-26 |