Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9304406 | Field facet mirror for an illumination optics of a projection exposure apparatus for EUV microlithography | Martin Endres | 2016-04-05 |
| 8717541 | Field facet mirror for an illumination optics of a projection exposure apparatus for EUV microlithography | Martin Endres | 2014-05-06 |