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CS Carl Zeiss Sms: 6 patents #7 of 118Top 6%
CG Carl Zeiss Smt Gmbh: 1 patents #657 of 1,189Top 60%
Overall (All Time): #840,798 of 4,157,543Top 25%
6
Patents All Time

Issued Patents All Time

Showing 1–6 of 6 patents

Patent #TitleCo-InventorsDate
10061192 Method and apparatus for correcting errors on a wafer processed by a photolithographic mask Dirk Beyer, Vladimir Dmitriev, Nadav Wertsman 2018-08-28
9436080 Method and apparatus for correcting errors on a wafer processed by a photolithographic mask Dirk Beyer, Vladimir Dmitriev, Nadav Wertsman 2016-09-06
9207530 Analyses of measurement data Vladimir Dmitriev, Erez Graitzer, Igor Varvaruk, Guy Ben-Zvi 2015-12-08
9134112 Critical dimension uniformity correction by scanner signature control Vladimir Dmitriev, Eran Chason, Guy Ben-Zvi, Igor Varvaruk 2015-09-15
8869076 Global landmark method for critical dimension uniformity reconstruction Vladimir Dmitriev 2014-10-21
8592770 Method and apparatus for DUV transmission mapping Guy Ben-Zvi, Eitan Zait, Vladimir Dmitriev, Steven Labovitz, Erez Graitzer 2013-11-26