Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340973 | Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product | Stefan Schubert, Dieter Schumacher, Erik Essers, Ingo Mueller, Arne Thoma +2 more | 2025-06-24 |
| 7109487 | Particle beam device | Martin Kienle, Helmut Muller, Peter Hoffrogge | 2006-09-19 |