Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9947504 | Particle beam apparatus and method for operating a particle beam apparatus | Klaus Hegele, Edgar Fichter, Michel Aliman, Dirk Preikszas, Christian Hendrich +2 more | 2018-04-17 |
| 9312093 | Particle beam device comprising an electrode unit | Joerg Fober, Edgar Fichter, Dirk Preikszas, Christian Hendrich, Momme Mommsen +2 more | 2016-04-12 |