Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688583 | Operating a particle beam apparatus with an object holder | — | 2023-06-27 |
| 7015487 | Apparatus and method for exposing a radiation sensitive layer by means of charged particles as well as a mask for this purpose | Oliver Kienzle | 2006-03-21 |