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Method of forming laminate and method of manufacturing photovoltaic device |
Takaharu Kondo, Hideo Tamura, Atsushi Yasuno, Noboru Toyama, Masumitsu Iwata +2 more |
2008-11-04 |
| 7282132 |
Zinc oxide film treatment method and method of manufacturing photovoltaic device utilizing the same |
Masumitsu Iwata, Noboru Toyama, Ryo Hayashi, Tomonori Nishimoto, Takaharu Kondo +2 more |
2007-10-16 |
| 7112264 |
Plating apparatus and method |
Hidetoshi Tsuzuki, Noboru Toyama, Yasuyoshi Takai, Ryo Hayashi, Masumitsu Iwata +1 more |
2006-09-26 |
| 6951771 |
Method of forming laminate and method of manufacturing photovoltaic device |
Takaharu Kondo, Hideo Tamura, Atsushi Yasuno, Noboru Toyama, Masumitsu Iwata +2 more |
2005-10-04 |
| 6802953 |
Method of producing zinc oxide thin film, method of producing photovoltaic device and method of producing semiconductor device |
Masafumi Sano |
2004-10-12 |
| 6752915 |
Web conveying apparatus, and apparatus and method for electrodeposition using web conveying apparatus |
Kozo Arao, Noboru Toyama, Yusuke Miyamoto |
2004-06-22 |
| 6733650 |
Apparatus and process for producing zinc oxide film |
Kozo Arao, Noboru Toyama, Yusuke Miyamoto |
2004-05-11 |
| 6660931 |
Substrate for solar cell, solar cell having the same, and production process of solar cell |
Noboru Toyama, Yusuke Miyamoto |
2003-12-09 |
| 6632346 |
Process for electrodepositing zinc oxide film |
Kozo Arao, Noboru Toyama, Yusuke Miyamoto |
2003-10-14 |
| 6592739 |
Process and apparatus for forming zinc oxide film, and process and apparatus for producing photovoltaic device |
Kozo Arao, Noboru Toyama, Yusuke Miyamoto |
2003-07-15 |
| 6576112 |
Method of forming zinc oxide film and process for producing photovoltaic device using it |
Noboru Toyama, Yusuke Miyamoto, Hidetoshi Tsuzuki |
2003-06-10 |
| 6544877 |
Method of producing thin film of zinc oxide, process for manufacturing photovoltaic element using its method, and photovoltaic element |
Kozo Arao, Noboru Toyama, Yusuke Miyamoto |
2003-04-08 |
| 6475367 |
Electrodeposition method |
Noboru Toyama, Kozo Arao, Yusuke Miyamoto |
2002-11-05 |
| 6471848 |
Electrodeposition method of forming an oxide film |
Kozo Arao, Noboru Toyama, Yusuke Miyamoto |
2002-10-29 |
| 6383359 |
Method for forming a zinc oxide layer and method for producing a photovoltaic device |
Kozo Arao, Hideo Tamura, Noboru Toyama, Yusuke Miyamoto |
2002-05-07 |
| 6346184 |
Method of producing zinc oxide thin film, method of producing photovoltaic device and method of producing semiconductor device |
Masafumi Sano |
2002-02-12 |
| 6238808 |
Substrate with zinc oxide layer, method for producing zinc oxide layer, photovoltaic device, and method for producing photovoltaic device |
Kozo Arao, Hideo Tamura, Noboru Toyama, Yusuke Miyamoto |
2001-05-29 |
| 6133061 |
Method of forming thin zinc oxide film, and method of producing semiconductor element substrate and photovoltaic element using thin zinc oxide film |
— |
2000-10-17 |
| 6068755 |
Process for forming zinc oxide film and processes for producing semiconductor device plate and photo-electricity generating device using the film |
Koichi Matsuda, Tetsuro Nakamura |
2000-05-30 |
| 5603778 |
Method of forming transparent conductive layer, photoelectric conversion device using the transparent conductive layer, and manufacturing method for the photoelectric conversion device |
— |
1997-02-18 |
