Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9928998 | Sputtering apparatus | — | 2018-03-27 |
| 9437702 | Electronic component manufacturing method and electrode structure | Akira Matsuo, Naomu Kitano, Eitaroh Morimoto, Koji Yamazaki, Yu Sato +1 more | 2016-09-06 |
| 8835296 | Electronic component manufacturing method including step of embedding metal film | Shunichi Wakayanagi, Takayuki Saito, Takuya Seino, Akira Matsuo, Koji Yamazaki +3 more | 2014-09-16 |
| 8252118 | Substrate support device and plasma processing apparatus | Yasuyuki Shirai, Hirofumi Asanuma, Junji Nakamura | 2012-08-28 |