Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8252118 | Substrate support device and plasma processing apparatus | Yohsuke Shibuya, Yasuyuki Shirai, Junji Nakamura | 2012-08-28 |
HA
Hirofumi Asanuma
Overall (All Time): #3,220,285 of 4,157,543Top 80%
1
Patents All Time