Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7144682 | Near-field exposure method | Ryo Kuroda, Natsuhiko Mizutani | 2006-12-05 |
| 7144685 | Method for making a pattern using near-field light exposure through a photomask | Natsuhiko Mizutani | 2006-12-05 |
| 7050144 | Photomask for near-field exposure and exposure apparatus including the photomask for making a pattern | Natsuhiko Mizutani | 2006-05-23 |
| 7001696 | Near-field light exposure mask with avoidance of overlap of near-field light, method for manufacturing the same, exposure apparatus and method using near-field light exposure mask, and method for manufacturing device | Ryo Kuroda | 2006-02-21 |
| 6849391 | Photoresist, photolithography method using the same, and method for producing photoresist | Takako Yamaguchi | 2005-02-01 |
| 6785445 | Near field light probe, near field optical microscope, near field light lithography apparatus, and near field light storage apparatus that have the near field light probe | Ryo Kuroda, Takako Yamaguchi, Tomohiro Yamada | 2004-08-31 |
| 6720115 | Exposure method and exposure apparatus using near-field light and exposure mask | Ryo Kuroda, Takako Yamaguchi | 2004-04-13 |
| 6721040 | Exposure method and apparatus using near field light | Kenji Saito, Ryo Kuroda | 2004-04-13 |
| 6628392 | Light modulation apparatus and optical switch, movement detecting device and distance measuring device, alignment device and semiconductor aligner, and processes thereof | Ryo Kuroda, Yasuhiro Shimada, Junichi Seki, Takako Yamaguchi | 2003-09-30 |