Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194248 | Method of managing imprint apparatus, imprint apparatus, method of managing planarized layer forming apparatus, and method of manufacturing article | — | 2021-12-07 |
| 8982315 | Exposure apparatus, temperature regulating system, and device manufacturing method | — | 2015-03-17 |
| 8184261 | Exposure apparatus | — | 2012-05-22 |
| 7486378 | Exposure apparatus | — | 2009-02-03 |
| 7317505 | Exposure apparatus and device manufacturing method | Makoto Nomoto | 2008-01-08 |
| 7283199 | Exposure apparatus, and device manufacturing method | Makoto Nomoto | 2007-10-16 |