Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12146696 | Cooling device, semiconductor manufacturing apparatus, and semiconductor manufacturing method | — | 2024-11-19 |
| 11754913 | Cooling apparatus having refrigerant flow generator and light source apparatus and image projection apparatus including the cooling apparatus | — | 2023-09-12 |
| 11686996 | Light source apparatus and image projection apparatus | — | 2023-06-27 |
| 11150546 | Light source apparatus and projector | — | 2021-10-19 |
| 10191359 | Illumination apparatus and image display apparatus using the illumination apparatus | — | 2019-01-29 |
| 10108075 | Image projection apparatus | — | 2018-10-23 |
| 9664987 | Image display apparatus | — | 2017-05-30 |
| 8373844 | Exposure apparatus having an element to be cooled | — | 2013-02-12 |
| 7978305 | Exposure apparatus and device manufacturing method | — | 2011-07-12 |
| 7679716 | Exposure apparatus and device manufacturing method | — | 2010-03-16 |
| 7352437 | Exposure apparatus | — | 2008-04-01 |
| 7317505 | Exposure apparatus and device manufacturing method | Shintaro Aichi | 2008-01-08 |
| 7283199 | Exposure apparatus, and device manufacturing method | Shintaro Aichi | 2007-10-16 |
| 7148955 | Temperature adjusting system and exposure apparatus incorporating the same | — | 2006-12-12 |
| 6987554 | Temperature adjusting system and exposure apparatus incorporating the same | — | 2006-01-17 |