Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10578846 | Projection optical system, exposure apparatus, and article manufacturing method | Michio Kono, Kiyoshi Fukami | 2020-03-03 |
| 10067325 | Projection optical system, exposure apparatus, and article manufacturing method | Michio Kono, Kiyoshi Fukami | 2018-09-04 |