Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11966043 | Imaging optical system, exposure apparatus, and article manufacturing method | — | 2024-04-23 |
| 11448969 | Illumination optical system, exposure apparatus, and article manufacturing method | — | 2022-09-20 |
| 11215930 | Exposure apparatus, and article manufacturing method | — | 2022-01-04 |
| 11099488 | Exposure apparatus and article manufacturing method | — | 2021-08-24 |
| 10921717 | Exposure apparatus and article manufacturing method | — | 2021-02-16 |
| 10578846 | Projection optical system, exposure apparatus, and article manufacturing method | Kiyoshi Fukami, Ryosuke Fukuoka | 2020-03-03 |
| 10067325 | Projection optical system, exposure apparatus, and article manufacturing method | Kiyoshi Fukami, Ryosuke Fukuoka | 2018-09-04 |
| 8294874 | Exposure apparatus | — | 2012-10-23 |
| 8174679 | Illumination optical system, exposure apparatus, and device fabrication method | — | 2012-05-08 |
| 7864296 | Exposure apparatus, setting method, and exposure method having the same | Kazuhiro Takahashi, Koji Mikami | 2011-01-04 |