Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8770958 | Pattern forming method and pattern forming apparatus in which a substrate and a mold are aligned in an in-plane direction | Junichi Seki, Masao Majima, Atsunori Terasaki, Hideki Ina | 2014-07-08 |
| 8760664 | Imaging apparatus and imaging method using optical coherence tomography | — | 2014-06-24 |
| 8668484 | Mold, imprint method, and process for producing a chip | Atsunori Terasaki, Junichi Seki, Hideki Ina, Shingo Okushima | 2014-03-11 |
| 8634081 | Tomographic imaging method and tomographic imaging apparatus | Yoshihiko Iwase | 2014-01-21 |
| 8568639 | Process for producing a device using a mold | Atsunori Terasaki, Junichi Seki, Hideki Ina | 2013-10-29 |
| 8562846 | Process for producing a chip using a mold | Atsunori Terasaki, Junichi Seki, Hideki Ina, Shingo Okushima | 2013-10-22 |
| 8517537 | Optical coherence tomographic imaging method and optical coherence tomographic imaging apparatus | Kazuhiro Matsumoto, Nobuhiro Tomatsu | 2013-08-27 |
| 8504141 | Optical tomographic image generating apparatus and optical tomographic image generating method | Mitsuro Sugita | 2013-08-06 |
| 8390819 | Optical coherence tomography method and optical coherence tomography apparatus that removes a mirror image of an adjacent region to the measurement region | — | 2013-03-05 |
| 8246887 | Imprint method and process for producing a chip that change a relative position between a member to be processed and a support portion | Junichi Seki, Masao Majima | 2012-08-21 |
| 8233152 | Optical coherence tomographic imaging method and optical coherence tomographic imaging apparatus | — | 2012-07-31 |
| 8202075 | Imprint apparatus and imprint method | Junichi Seki, Masao Majima | 2012-06-19 |
| 8047828 | Imprint apparatus, imprint method, and mold for imprint | Junichi Seki, Hideki Ina | 2011-11-01 |
| 8011916 | Mold, imprint apparatus, and process for producing structure | Junichi Seki | 2011-09-06 |
| 7985061 | Imprint apparatus having attitude control | Junichi Seki, Shingo Okushima | 2011-07-26 |
| 7981304 | Process for producing a chip using a mold | Atsunori Terasaki, Junichi Seki, Hideki Ina, Shingo Okushima | 2011-07-19 |
| 7927089 | Mold, apparatus including mold, pattern transfer apparatus, and pattern forming method | Junichi Seki, Masao Majima | 2011-04-19 |
| 7884935 | Pattern transfer apparatus, imprint apparatus, and pattern transfer method | Junichi Seki, Hideki Ina, Koichi Sentoku | 2011-02-08 |
| 7828984 | Imprint method, imprint apparatus, and process for producing chip | Junichi Seki | 2010-11-09 |
| 7794222 | Mold, pattern forming method, and pattern forming apparatus | Junichi Seki, Masao Majima, Atsunori Terasaki, Hideki Ina | 2010-09-14 |
| 7708927 | Imprint method and imprint apparatus | Junichi Seki, Shingo Okushima | 2010-05-04 |
| 7635260 | Processing apparatus, processing method, and process for producing chip | Junichi Seki, Masao Majima | 2009-12-22 |
| 7531821 | Imprint apparatus and imprint method including dual movable image pick-up device | Junichi Seki, Hideki Ina, Koichi Sentoku | 2009-05-12 |
| 7510388 | Mold, imprint method, and process for producing chip | Atsunori Terasaki, Junichi Seki, Hideki Ina, Shingo Okushima | 2009-03-31 |
| 7336471 | Charge eliminating mechanism for stage and testing apparatus | Yoshimune Misawa | 2008-02-26 |