Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12264722 | Vibration damping apparatus, reaction force processing system, stage apparatus, exposure apparatus, substrate processing device, and method for manufacturing article | — | 2025-04-01 |
| 11192263 | Robot hand and control method for the robot hand | — | 2021-12-07 |
| 10688658 | Method of controlling holding apparatus, holding apparatus, and robot apparatus | Shingo Amano, Isamu Okuma | 2020-06-23 |
| 9200969 | Force sensor | — | 2015-12-01 |