Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7342645 | Stage control apparatus and method, stage apparatus and exposure apparatus | — | 2008-03-11 |
| 7264235 | Active damping apparatus, exposure apparatus and device manufacturing method | — | 2007-09-04 |
| 7119879 | Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method | — | 2006-10-10 |
| 7069114 | Anti-vibration technique | — | 2006-06-27 |
| 7024284 | Anti-vibration technique | — | 2006-04-04 |
| 6975383 | Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method | — | 2005-12-13 |
| 6937317 | Active damping apparatus, exposure apparatus and device manufacturing method | — | 2005-08-30 |
| 6903806 | Stage control apparatus, exposure apparatus, and device manufacturing method | — | 2005-06-07 |
| 6864962 | Active anti-vibration apparatus and exposure apparatus and device manufacturing method using the same | — | 2005-03-08 |
| 6160612 | Scanning type exposure apparatus, position control apparatus, and method therefor | Hiroshi Itoh | 2000-12-12 |
| 5936710 | Scanning type exposure apparatus, position control apparatus, and method therefor | Hiroshi Itoh | 1999-08-10 |
| 5612602 | Device and method comprising a motor and/or a digital signal processor, means for supplying signals of a plurality of channels in serial form, or means for causing an actuator to abut an object | Yoichi Kubota, Naoki Kawamata, Katsuhiro Fujii, Hiroshi Itoh, Hiroaki Takeishi | 1997-03-18 |
| 5305193 | Adaptive apparatus | Shinji Shinnaka, Mikio Sato | 1994-04-19 |
| 5233586 | Servo control system for controlling tracking of an optical head on an optical disk | — | 1993-08-03 |