Issued Patents All Time
Showing 26–50 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410436 | Method of cleaning porous body, and process for producing porous body, non-porous film or bonded substrate | Satoshi Matsumura | 2002-06-25 |
| 6383890 | Wafer bonding method, apparatus and vacuum chuck | Toru Takisawa, Takao Yonehara | 2002-05-07 |
| 6309505 | Substrate processing apparatus and method | Toru Takisawa, Takao Yonehara | 2001-10-30 |
| 6258240 | Anodizing apparatus and method | Satoshi Matsumura | 2001-07-10 |
| 6202655 | Anodizing apparatus and apparatus and method associated with the same | — | 2001-03-20 |
| 6200878 | SOI substrate processing method | Kiyofumi Sakaguchi | 2001-03-13 |
| 6156624 | Method for production of SOI substrate by pasting and SOI substrate | Takao Yonehara, Tadashi Atoji, Kiyofumi Sakaguchi | 2000-12-05 |
| 6103598 | Process for producing semiconductor substrate | Takao Yonehara, Nobuhiko Sato, Kiyofumi Sakaguchi | 2000-08-15 |
| 6100166 | Process for producing semiconductor article | Kiyofumi Sakaguchi, Takao Yonehara, Shoji Nishida | 2000-08-08 |
| 5980633 | Process for producing a semiconductor substrate | Takao Yonehara | 1999-11-09 |
| 5951833 | Anodizing apparatus | — | 1999-09-14 |
| 5695557 | Process for producing a semiconductor substrate | Takao Yonehara | 1997-12-09 |
| 5679475 | Semiconductor substrate and process for preparing the same | Takao Yonehara | 1997-10-21 |
| 5670411 | Process of making semiconductor-on-insulator substrate | Takao Yonehara | 1997-09-23 |
| 5653802 | Method for forming crystal | — | 1997-08-05 |
| 5580381 | Method of forming crystal | — | 1996-12-03 |
| 5466631 | Method for producing semiconductor articles | Takeshi Ichikawa, Takao Yonehara, Masaru Sakamoto, Yasuhiro Naruse, Jun Nakayama +1 more | 1995-11-14 |
| 5453394 | Process for preparing semiconductor substrate by bringing first and second substrates in contact | Takao Yonehara | 1995-09-26 |
| 5447117 | Crystal article, method for producing the same and semiconductor device utilizing the same | Takao Yonehara, Yuji Nishigaki | 1995-09-05 |
| 5405802 | Process of fabricating a semiconductor substrate | Takao Yonehara | 1995-04-11 |
| 5403751 | Process for producing a thin silicon solar cell | Shoji Nishida | 1995-04-04 |
| 5363799 | Method for growth of crystal | Takao Yonehara, Yuji Nishigaki | 1994-11-15 |
| 5304820 | Process for producing compound semiconductor and semiconductor device using compound semiconductor obtained by same | Hiroyuki Tokunaga, Takao Yonehara | 1994-04-19 |
| 5250460 | Method of producing semiconductor substrate | Takao Yonehara | 1993-10-05 |
| 5236544 | Process for growing crystal | — | 1993-08-17 |