Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5179042 | Process for forming deposited film by use of alkyl aluminum hydride | Nobuo Mikoshiba, Kazuo Tsubouchi | 1993-01-12 |
| 5093573 | Reflection electron diffractometer and method for observing microscopic surface structure | Nobuo Mikoshiba, Tadashiro Ohmi, Kazuo Tsubouchi | 1992-03-03 |
| 5091210 | Plasma CVD of aluminum films | Nobuo Mikoshiba, Kazuo Tsubouchi | 1992-02-25 |