Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7828623 | Apparatus for processing substrate and apparatus for processing electron source substrate | — | 2010-11-09 |
| 7445535 | Electron source producing apparatus and method | Shigeto Kamata | 2008-11-04 |
| 7226331 | Electron source manufacturing apparatus and electron source manufacturing method | Shigeto Kamata, Kazuhiro Oki, Akihiro Kimura | 2007-06-05 |
| 5700326 | Microwave plasma processing apparatus | Takashi Kurokawa, Hiroshi Echizen, Akio Koganei, Shuichiro Sugiyama, Toshio Adachi | 1997-12-23 |