| 6077718 |
Method for forming deposited film |
Hisanori Tsuda, Masafumi Sano, Yutaka Hirai |
2000-06-20 |
| 5769950 |
Device for forming deposited film |
Hisanori Tsuda, Masafumi Sano, Yutaka Hirai |
1998-06-23 |
| 5273919 |
Method of producing a thin film field effect transistor |
Masafumi Sano, Hisanori Tsuda, Yutaka Hirai |
1993-12-28 |
| 5261961 |
Device for forming deposited film |
Hisanori Tsuda, Masafumi Sano, Yutaka Hirai |
1993-11-16 |
| 4987460 |
Light emitting device |
Masafumi Sano, Hisanori Tsuda, Yutaka Hirai |
1991-01-22 |
| 4921722 |
Method for forming deposited film |
Yoshiyuki Osada, Hisanori Tsuda, Masafumi Sano, Satoshi Omata, Yutaka Hirai |
1990-05-01 |
| 4920387 |
Light emitting device |
Masafumi Sano, Hisanori Tsuda, Yutaka Hirai |
1990-04-24 |
| 4916510 |
Thin film mesa transistor of field effect type with superlattice |
Masafumi Sano, Hisanori Tsuda, Yutaka Hirai |
1990-04-10 |
| 4914490 |
Non-single crystal electroluminescent device |
Masafumi Sano, Hisanori Tsuda, Yutaka Hirai |
1990-04-03 |
| 4893154 |
Electroluminescent device |
Yutaka Hirai, Masafumi Sano, Hisanori Tsuda |
1990-01-09 |
| 4675731 |
Diagnostic apparatus |
Kiyoshi Okazaki |
1987-06-23 |
| 4645684 |
Method for forming deposited film |
Yoshiyuki Osada, Hisanori Tsuda, Masafumi Sano, Satoshi Omata, Yutaka Hirai |
1987-02-24 |
| 4626449 |
Method for forming deposition film |
Yutaka Hirai, Hiroshi Echizen, Masafumi Sano, Hisanori Tsuda |
1986-12-02 |
