Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531276 | Exposure apparatus, exposure method, and article manufacturing method | — | 2022-12-20 |
| 11181825 | Exposure apparatus and method of manufacturing article | Akihito Hashimoto | 2021-11-23 |
| 9534888 | Detection apparatus, measurement apparatus, exposure apparatus, method of manufacturing article, and measurement method | — | 2017-01-03 |
| 7768443 | Vessel monitoring system | Hayama Imazu, Takashi Yoshioka, Hisaichi Ohshima, Yoshiyuki Kiya, Takumi Kawamoto | 2010-08-03 |
| 7209215 | Exposure apparatus and method | — | 2007-04-24 |
| 4768153 | Automatic pilot system | — | 1988-08-30 |