Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181825 | Exposure apparatus and method of manufacturing article | Akio Akamatsu | 2021-11-23 |
| 9733578 | Measurement apparatus, lithography apparatus, and method of manufacturing article | Satoshi Maruyama | 2017-08-15 |