Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7850366 | Sheet for shielding soft X-rays in a remover using soft X-rays that removes static charges and a method of manufacturing it | — | 2010-12-14 |
| 7416998 | Air-curtain forming apparatus for wafer hermetic container in semiconductor-fabrication equipment of minienvironment system | Shigeru Kouchiyama, Makoto Okada, Kouta Ueno | 2008-08-26 |
| 7335244 | Air-purifying device for a front-opening unified pod | Makoto Okada, Yasunori Horibe | 2008-02-26 |