Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7416998 | Air-curtain forming apparatus for wafer hermetic container in semiconductor-fabrication equipment of minienvironment system | Toshirou Kisakibaru, Makoto Okada, Kouta Ueno | 2008-08-26 |