Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7914954 | Stencil, stencil design system and method for cell projection particle beam lithography | Akira Fujimura, Takashi Mitsuhashi | 2011-03-29 |
| 7902528 | Method and system for proximity effect and dose correction for a particle beam writing device | Daisuke Hara, Takashi Mitsuhashi | 2011-03-08 |
| 7824828 | Method and system for improvement of dose correction for particle beam writers | Akira Fujimura, Daisuke Hara, Takashi Mitsuhashi | 2010-11-02 |