Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4515876 | X-Ray lithography mask and method for fabricating the same | Akira Ozawa, Misao Sekimoto, Toshiro Ono | 1985-05-07 |
| 4401054 | Plasma deposition apparatus | Seitaro Matsuo, Shinichi Yamazaki | 1983-08-30 |
| 4238706 | Soft x-ray source and method for manufacturing the same | Mikiho Kiuchi, Satoshi Nakayama, Toa Hayasaka, Junji Matsui | 1980-12-09 |