Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5016332 | Plasma reactor and process with wafer temperature control | Richard F. Reichelderfer, Andrew P. Ryan, John Davies | 1991-05-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5016332 | Plasma reactor and process with wafer temperature control | Richard F. Reichelderfer, Andrew P. Ryan, John Davies | 1991-05-21 |